A Comparison of Current and Emerging Ion and Laser Beam Techniques for High Throughput Material Removal
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Abstract
Srinivas Subramaniam, Kaushik Muthur, K Johnson, Mclean P Echlin; A Comparison of Current and Emerging Ion and Laser Beam Techniques for High Throughput Ma
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Ion-surface interactions and analysis · Integrated Circuits and Semiconductor Failure Analysis · Diamond and Carbon-based Materials Research
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References (3)
Show source-provided references
1. 10.1017/S143192761400320110.1017/S1431927614003201 ↗
2. The authors would like to acknowledge Deepak Goyal for help with reviewing the paper.
3. 10.1016/j.matchar.2014.10.02310.1016/j.matchar.2014.10.023 ↗