Treading Lightly - Achieving Spectroscopy and Elemental Maps of Beam Sensitive Specimens in the SEM
Source abstract
Abstract
J T Sagar, J Holland, S R Burgess; Treading Lightly - Achieving Spectroscopy and Elemental Maps of Beam Sensitive Specimens in the SEM, Microscopy and Micr
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Electron and X-Ray Spectroscopy Techniques · Advanced Electron Microscopy Techniques and Applications · Integrated Circuits and Semiconductor Failure Analysis
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References (3)
Show source-provided references
1. 10.1103/RevModPhys.39.7810.1103/RevModPhys.39.78 ↗
2. 10.1016/j.micron.2004.02.00310.1016/j.micron.2004.02.003 ↗
3. 10.1002/sca.2130210.1002/sca.21302 ↗