In Situ Nanoprobing Tools for Fault Localization and Defect Characterization
Source abstract
Abstract
Andrew J Smith, Andreas Rummel, Matthias Kemmler, Klaus Schock, Stephan Kleindiek; In Situ Nanoprobing Tools for Fault Localization and Defect Characteriza
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Integrated Circuits and Semiconductor Failure Analysis · Ion-surface interactions and analysis · Advanced Electron Microscopy Techniques and Applications
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (3)
Show source-provided references
1. Kemmler M , Rummel A , Schock K & Kleindiek S (2015). IEEE 22nd International Symposium on the Journal Physical and Failure Analysis of Integrated Circuits (IPFA).
2. Ring R. , et al, ISTFA 2015: Proceedings from the 41st International Symposium for Testing and Failure Analysis.
3. Ledig · Phys. Status Solidi A · 2015 · 1–8 · 1