The “Great VPSEM Gotcha”: Great VPSEM Imaging Does Not Imply Great VPSEM X-ray Microanalysis! Degraded Spatial Resolution Is Always Imposed by Gas Scattering
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Abstract
Dale E Newbury, Nicholas W M Ritchie; The “Great VPSEM Gotcha”: Great VPSEM Imaging Does Not Imply Great VPSEM X-ray Microanalysis! Degraded Spatial Resolu
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Electron and X-Ray Spectroscopy Techniques · Advanced Electron Microscopy Techniques and Applications · Integrated Circuits and Semiconductor Failure Analysis
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References (6)
Show source-provided references
1. Danilatos · Scanning Microscopy · 1990 · 4 · 799
2. Ritchie N. DTSA-II available free at: www.cstl .nist.gov/div837/837.02/epq/dtsa2/index.html.
3. Doehne · Microbeam Analysis · 1993 · 2
4. 10.1002/jemt.107025050310.1002/jemt.1070250503 ↗
5. Bolon R. , Robertson C. & Lifshin E. Microbeam Analysis-1989, ed. P. Russell (San Francisco Press) p. 449.
6. Doehne · Scanning Microscopy · 1990 · 4 · 275