Improvements in Characterization of FIB Prepared Surfaces of Aluminum Using Xe+ Plasma FIB
Source abstract
Abstract
Brandon Van Leer, Rick Passey; Improvements in Characterization of FIB Prepared Surfaces of Aluminum Using Xe+ Plasma FIB, Microscopy and Microanalysis, Vo
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Integrated Circuits and Semiconductor Failure Analysis · Electron and X-Ray Spectroscopy Techniques · Ion-surface interactions and analysis
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (3)
Show source-provided references
1. 10.1016/S1359-6462(99)00293-610.1016/S1359-6462(99)00293-6 ↗
2. 10.1557/PROC-480-1910.1557/PROC-480-19 ↗
3. 10.1111/j.1365-2818.2010.03401.x10.1111/j.1365-2818.2010.03401.x ↗