Large Area 3D Structural Characterization by Serial Sectioning Using Broad Ion Beam Argon Ion Milling

P. Nowakowski; M.L. Ray; P.E. Fischione

doi:10.1017/s1431927617000745

journal article·2017-07Open access

Large Area 3D Structural Characterization by Serial Sectioning Using Broad Ion Beam Argon Ion Milling

P. Nowakowski, M.L. Ray, P.E. Fischione

Microscopy and Microanalysis· Volume 23· Issue S1

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P Nowakowski, ML Ray, PE Fischione; Large Area 3D Structural Characterization by Serial Sectioning Using Broad Ion Beam Argon Ion Milling, Microscopy and M

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OpenAlex topics: Integrated Circuits and Semiconductor Failure Analysis · Advanced Materials Characterization Techniques · Ion-surface interactions and analysis

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References (9)

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