Manganese Segregation Behavior in Damascene Metal Lines
Source abstract
Abstract
Guoda Lian, Malik Ali, Steve Boettcher; Manganese Segregation Behavior in Damascene Metal Lines, Microscopy and Microanalysis, Volume 23, Issue S1, 1 July
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Surface and Thin Film Phenomena · Ion-surface interactions and analysis · Semiconductor materials and devices
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (2)
Show source-provided references
1. 10.1063/1.471107010.1063/1.4711070 ↗
2. 10.1016/j.matchar.2010.09.00110.1016/j.matchar.2010.09.001 ↗