Temperature-dependent signals in STEM Electron Beam-Induced Current (EBIC) Imaging
Source abstract
Abstract
William A Hubbard, Edward R White, Matthew Mecklenburg, B C Regan; Temperature-dependent signals in STEM Electron Beam-Induced Current (EBIC) Imaging, Micr
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Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Advanced Electron Microscopy Techniques and Applications · Integrated Circuits and Semiconductor Failure Analysis · Electron and X-Ray Spectroscopy Techniques
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References (5)
Show source-provided references
1. 10.1103/PhysRevLett.8.26710.1103/PhysRevLett.8.267 ↗
2. 10.1557/PROC-743-L10.1010.1557/PROC-743-L10.10 ↗
3. This work has been supported by FAME, one of six centers of STARnet, a Semiconductor Research Corporation program sponsored by MARCO and DARPA, by National Science Foundation (NSF) award DMR-1611036, and by NSF STC award DMR-1548924. The authors acknowledge the use of instruments at the Electron Imaging Center for NanoMachines supported by NIH 1S10RR23057 and the CNSI at UCLA.
4. 10.1063/1.166330610.1063/1.1663306 ↗
5. 10.1063/1.493676310.1063/1.4936763 ↗