Beam Characterization for Scanning Electron Microscopes by the RPS and IPC Methods
Source abstract
Abstract
Tomoyo Sasaki, Mitsugu Sato, Kishio Hidaka, Jin Onuki; Beam Characterization for Scanning Electron Microscopes by the RPS and IPC Methods, Microscopy and M
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Electron and X-Ray Spectroscopy Techniques · Advanced Materials Characterization Techniques · Advanced Electron Microscopy Techniques and Applications
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References (10)
Show source-provided references
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9. 10.1016/0304-3991(92)90107-U10.1016/0304-3991(92)90107-U ↗
10. The authors are grateful to Dr. A. M. Blackburn for his valuable comments to this work.