Wave Optical Calculation of Probe Size in Low Energy Scanning Electron Microscope
Source abstract
Abstract
Abstract A wave optical calculation of the probe size of a low energy scanning electron microscope is presented. The resolution for the optimal aperture was computed and compared with results of standard approaches. The effect of deflection aberrations is also considered, and it was found to be critical for the landing energies below 5eV and fields of view larger than 100 x 100 μm2.
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Research context
OpenAlex topics: Electron and X-Ray Spectroscopy Techniques · Advanced Electron Microscopy Techniques and Applications · Integrated Circuits and Semiconductor Failure Analysis
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References (10)
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1. The author acknowledges the support from Ministry of Education, Youth and Sports of the Czech Republic (LO1212 and 7H13015) and the European Commission (ALISI No. CZ.1.05/2.1.00/01.0017 and E450EDL, No. 325613).
2. 10.1016/j.ijleo.2008.02.00410.1016/j.ijleo.2008.02.004 ↗
3. 10.1016/j.ultramic.2010.04.01810.1016/j.ultramic.2010.04.018 ↗
4. 10.1016/S0167-9317(04)00079-610.1016/S0167-9317(04)00079-6 ↗
5. Berz · Adv. Imaging Electron Phys. · 1999 · 108
6. 10.1016/S0304-3991(99)00194-110.1016/S0304-3991(99)00194-1 ↗
7. Hawkes · 1994 · 3
8. Barth · Optik · 1996 · 101 · 101
9. Krivanek · 601
10. Goto · Optik · 1977 · 48 · 255