Nanometer Scale Time of Flight Back Scattering Spectrometry in the Helium Ion Microscope
Source abstract
Abstract
Nico Klingner, Gregor Hlawacek, Rene Heller, Johannes von Borany, Stefan Facsko; Nanometer Scale Time of Flight Back Scattering Spectrometry in the Helium
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Electron and X-Ray Spectroscopy Techniques · Ion-surface interactions and analysis · X-ray Spectroscopy and Fluorescence Analysis
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (4)
Show source-provided references
1. 10.1016/j.jlumin.2014.09.01610.1016/j.jlumin.2014.09.016 ↗
2. 10.1088/0957-4484/26/43/43400110.1088/0957-4484/26/43/434001 ↗
3. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures · 2014 · 32 · 020801
4. 10.1016/j.ultramic.2009.01.01310.1016/j.ultramic.2009.01.013 ↗