Advantages of using Plasma FIB Over a Gallium LMIS Source
Source abstract
Abstract
BW Arey, DE Perera, L Kovarik, J Liu, O Qafoku, A R Felmy, R Kelley, T Landin, R Alvis; Advantages of using Plasma FIB Over a Gallium LMIS Source, Microsco
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Integrated Circuits and Semiconductor Failure Analysis · Ion-surface interactions and analysis · Metal and Thin Film Mechanics
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References
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