journal article·2015-08

Advantages of using Plasma FIB Over a Gallium LMIS Source

B.W. Arey, D.E. Perera, L. Kovarik, J. Liu, O. Qafoku, A. R. Felmy, R. Kelley, T. Landin, R. Alvis

Microscopy and Microanalysis· Volume 21· Issue S3
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Abstract

BW Arey, DE Perera, L Kovarik, J Liu, O Qafoku, A R Felmy, R Kelley, T Landin, R Alvis; Advantages of using Plasma FIB Over a Gallium LMIS Source, Microsco
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short

Research context

OpenAlex topics: Integrated Circuits and Semiconductor Failure Analysis · Ion-surface interactions and analysis · Metal and Thin Film Mechanics

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References

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