journal article·2016-07Open access

Evaluation of Neon Focused Ion Beam Milling for TEM Sample Preparation

T. C. Pekin, F. I. Allen, A. M. Minor

Microscopy and Microanalysis· Volume 22· Issue S3

Abstract

T C Pekin, F I Allen, A M Minor; Evaluation of Neon Focused Ion Beam Milling for TEM Sample Preparation, Microscopy and Microanalysis, Volume 22, Issue S3,
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short

Research context

OpenAlex topics: Advanced Electron Microscopy Techniques and Applications · Integrated Circuits and Semiconductor Failure Analysis · Electron and X-Ray Spectroscopy Techniques

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