Quantification of Milling Rate and Reduction in Amorphous Damage using Low Energy, Small Spot, Argon Ion Milling for TEM Specimens prepared by FIB.
Source abstract
Abstract
Mina Abadier, Michael Boccabella, Junhai Liu, Paul Fischione; Quantification of Milling Rate and Reduction in Amorphous Damage using Low Energy, Small Spot
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Advanced Materials Characterization Techniques · Integrated Circuits and Semiconductor Failure Analysis · Ion-surface interactions and analysis
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References (4)
Show source-provided references
1. Microscopy Today · 2011 · 19 · 16
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