3D Atomic Scale Analysis of CMOS type structures for 14 nm UTBB-SOI technology
Source abstract
Abstract
Robert Estivill, Adeline Grenier, Tony Printemps, Marc Juhel, Magali Gregoire, Pierre Caubet, Didier Blavette; 3D Atomic Scale Analysis of CMOS type struct
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Advanced Materials Characterization Techniques · Integrated Circuits and Semiconductor Failure Analysis · Electron and X-Ray Spectroscopy Techniques
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (4)
Show source-provided references
1. 10.1116/1.364787910.1116/1.3647879 ↗
2. 10.1016/j.ultramic.2013.10.00110.1016/j.ultramic.2013.10.001 ↗
3. 10.1063/1.270975810.1063/1.2709758 ↗
4. 10.1063/1.471774210.1063/1.4717742 ↗