Comparison of Secondary, Backscattered and Low Loss Electron Imaging for Dimensional Measurements in the Scanning Electron Microscope

Michael T. Postek; John Villarrubia; Andras E. Vladar; Atsushi Muto

doi:10.1017/s1431927615006315

journal article·2015-08

Comparison of Secondary, Backscattered and Low Loss Electron Imaging for Dimensional Measurements in the Scanning Electron Microscope

Michael T. Postek, John Villarrubia, Andras E. Vladar, Atsushi Muto

Microscopy and Microanalysis· Volume 21· Issue S3

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Abstract

Michael T Postek, John Villarrubia, Andras E Vladar, Atsushi Muto; Comparison of Secondary, Backscattered and Low Loss Electron Imaging for Dimensional Mea

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Source: openalex_inverted_index · Quality: short

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OpenAlex topics: Electron and X-Ray Spectroscopy Techniques · Advancements in Photolithography Techniques · Surface and Thin Film Phenomena

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References (7)

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4. SCANNING · 2001 · 23 · 29810.1002/sca.4950230502 ↗

5. 10.1063/1.165389910.1063/1.1653899 ↗

6. 10.1063/1.165313910.1063/1.1653139 ↗

7. Scan Electron Microsc, 1, IITRI Chicago · 1972 · 43