Nanoscale Strain Mapping in Embedded SiGe Devices by Dual Lens Dark Field Electron Holography and Precession Electron Diffraction
Source abstract
Abstract
Y Y Wang, D Cooper, J Rouviere, CE Murray, N Bernier, J Bruley; Nanoscale Strain Mapping in Embedded SiGe Devices by Dual Lens Dark Field Electron Holograp
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Advanced Electron Microscopy Techniques and Applications · Electron and X-Ray Spectroscopy Techniques · Surface and Thin Film Phenomena
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References
Reference metadata was not supplied for this record.