Quantification of STEM-EDS With Ion Implantation
Source abstract
Abstract
R Garcia, Y Liu, F A Stevie; Quantification of STEM-EDS With Ion Implantation, Microscopy and Microanalysis, Volume 22, Issue S3, 1 July 2016, Pages 138–13
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Integrated Circuits and Semiconductor Failure Analysis · Ion-surface interactions and analysis · Electron and X-Ray Spectroscopy Techniques
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (6)
Show source-provided references
1. Microscopy and Microanalysis Proceedings · 2002 · 8 · 1192CD10.1017/S1431927602107835 ↗
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3. 10.1007/0-387-23313-X_1010.1007/0-387-23313-X_10 ↗
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6. Microscopy and Microanalysis Proceedings · 2000 · 6 · 53610.1017/S1431927600035170 ↗