Analysis of H 2 and SiH 4 in the Deposition of pm-Si:H Thin Films by PECVD Process for Solar Cell Applications
Source abstract
Abstract
J Plaza-Castillo, A García-Barrientos, M Moreno-Moreno, M J Arellano-Jiménez, K Y Vizcaíno, JL Bernal; Analysis of H 2 and SiH 4 in the Deposition of pm-Si
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Thin-Film Transistor Technologies · Silicon and Solar Cell Technologies · Silicon Nanostructures and Photoluminescence
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (3)
Show source-provided references
1. Opto-Electronics Review · 2012 · 20 · 168
2. 10.1016/j.jallcom.2014.11.10510.1016/j.jallcom.2014.11.105 ↗
3. Microsc. Microanal. · 2015 · 21 · 29710.1017/S1431927615002287 ↗