Using Electron Channeling Contrast Imaging for Misfit Dislocation Characterization in Heteroepitaxial III-V/Si Thin Films
Source abstract
Abstract
Julia Deitz, Santino Carnevale, Marc De Graef, Yoosuf N Picard, Stephen A Ringel, Tyler Grassman, David W McComb; Using Electron Channeling Contrast Imagin
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Integrated Circuits and Semiconductor Failure Analysis · Electron and X-Ray Spectroscopy Techniques · Advanced Electron Microscopy Techniques and Applications
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