New High-Resolution Low-Voltage and High Performance Analytical FIB/SEM System
Source abstract
Abstract
Jaroslav Jiruše, Miloslav Havelka, Martin Haničinec, Jan Polster, Tomáš Hrnčíř; New High-Resolution Low-Voltage and High Performance Analytical FIB/SEM Sys
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Integrated Circuits and Semiconductor Failure Analysis · Electron and X-Ray Spectroscopy Techniques · Advanced Electron Microscopy Techniques and Applications
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References
Reference metadata was not supplied for this record.