journal article·2002-08Open access

Auger Analysis Of Focused Ion Beam Prepared Lift -Out Specimens

B.B. Rossie, R. M. Mills, S.D. Anderson, M. Antonell, F.A. Stevie

Microscopy and Microanalysis· Volume 8· Issue S02

Abstract

BB Rossie, R M Mills, SD Anderson, M Antonell, FA Stevie; Auger Analysis Of Focused Ion Beam Prepared Lift -Out Specimens, Microscopy and Microanalysis, Vo
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short

Research context

OpenAlex topics: Electron and X-Ray Spectroscopy Techniques · Ion-surface interactions and analysis · Integrated Circuits and Semiconductor Failure Analysis

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