journal article·2003-08Open access

Applications of Focused Ion Beam Using FEI DualBeam DB235: How Deep Is How Small a Hole? & How to Drill It Deeper & Smaller?

Warren J. MoberlyChan, Erik J. Sanchez, Peter R. H. Stark, John T. Krug

Microscopy and Microanalysis· Volume 9· Issue S02

Abstract

Warren J MoberlyChan, Erik J Sanchez, Peter R H Stark, John T Krug; Applications of Focused Ion Beam Using FEI DualBeam DB235: How Deep Is How Small a Hole
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short

Research context

OpenAlex topics: Electron and X-Ray Spectroscopy Techniques · Advanced Electron Microscopy Techniques and Applications · Integrated Circuits and Semiconductor Failure Analysis

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

References

Reference metadata was not supplied for this record.