journal article·2002-08Open access

EBSD Performed “In-Situ” on a Dual-Beam FIB

J.K. Farrer, M.C. Chipman, M. Tiner

Microscopy and Microanalysis· Volume 8· Issue S02

Abstract

JK Farrer, MC Chipman, M Tiner; EBSD Performed “In-Situ” on a Dual-Beam FIB, Microscopy and Microanalysis, Volume 8, Issue S02, 1 August 2002, Pages 544–54
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Source: openalex_inverted_index · Quality: short

Research context

OpenAlex topics: Integrated Circuits and Semiconductor Failure Analysis · Non-Destructive Testing Techniques · Advanced Surface Polishing Techniques

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References

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