Precision Limits to STEM Imaging from Dynamical Scattering and Channeling of Sub-Angstrom Electron Probes
Source abstract
Abstract
Andrew B Yankovich, Paul M Voyles; Precision Limits to STEM Imaging from Dynamical Scattering and Channeling of Sub-Angstrom Electron Probes, Microscopy an
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Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Advanced Electron Microscopy Techniques and Applications · Electron and X-Ray Spectroscopy Techniques · Integrated Circuits and Semiconductor Failure Analysis
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