journal article·2014-08Open access

Ga+ FIB Milling and Measurement of FIB Damage in Sapphire

Brandon Van Leer, Huikai Cheng, Jessica Riesterer

Microscopy and Microanalysis· Volume 20· Issue S3

Abstract

Brandon Van Leer, Huikai Cheng, Jessica Riesterer; Ga+ FIB Milling and Measurement of FIB Damage in Sapphire, Microscopy and Microanalysis, Volume 20, Issu
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short

Research context

OpenAlex topics: Integrated Circuits and Semiconductor Failure Analysis · Advanced Materials Characterization Techniques · Advanced Electron Microscopy Techniques and Applications

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