journal article·2010-07Open access

Automated XPS Analysis of Passivated Stainless Steel to the SEMI Standard

RG White, TS Nunney, BR Strohmeier, JD Piasecki, RJ Lee

Microscopy and Microanalysis· Volume 16· Issue S2

Abstract

Extended abstract of a paper presented at Microscopy and Microanalysis 2010 in Portland, Oregon, USA, August 1 – August 5, 2010.
Only a short abstract or summary was supplied by the source.
Source: crossref · Quality: short

Research context

OpenAlex topics: Electron and X-Ray Spectroscopy Techniques · Ion-surface interactions and analysis · Advanced Materials Characterization Techniques

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

References

Reference metadata was not supplied for this record.