Surface Microanalysis with Slow Electrons
Source abstract
Abstract
Microanalysis on the 10-nm level using imaging, diffraction, and spectroscopy of slow photo-emitted and reflected electrons is discussed. The instrumentation that uses a cathode lens is briefly reviewed, and a number of applications illustrate the power of this microanalysis method.
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Research context
OpenAlex topics: Electron and X-Ray Spectroscopy Techniques · Advancements in Photolithography Techniques · Advanced Materials Characterization Techniques
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References (6)
Show source-provided references
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