O+ PFIB Milling and Measurement of FIB Damage in Silicon
Source abstract
Abstract
Brandon van Leer, Lee Casalena; O+ PFIB Milling and Measurement of FIB Damage in Silicon, Microscopy and Microanalysis, Volume 26, Issue S2, 1 August 2020,
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Integrated Circuits and Semiconductor Failure Analysis · Advanced Surface Polishing Techniques · Advanced Electron Microscopy Techniques and Applications
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (4)
Show source-provided references
1. Ziegler · SRIM · 2003
2. 10.1017/S143192761300630210.1017/S1431927613006302 ↗
3. Van Leer · Microscopy and Microanalysis · 2019 · 25
4. Giannuzzi · Microscopy and Microanalysis · 2005 · 11