Modeling SEM Column, Probe Formation, and Imaging Using Fourier Optics
Source abstract
Abstract
Surya Kamal, Richard Hailstone; Modeling SEM Column, Probe Formation, and Imaging Using Fourier Optics, Microscopy and Microanalysis, Volume 27, Issue S1,
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Electron and X-Ray Spectroscopy Techniques · Integrated Circuits and Semiconductor Failure Analysis · Surface and Thin Film Phenomena
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References (4)
Show source-provided references
1. Ximen · Journal of Microscopy · 1993 · 170 · 11910.1111/j.1365-2818.1993.tb03330.x ↗
2. Zotta · Microscopy and Microanalysis · 2018 · 24 · 39610.1017/S1431927618012412 ↗
3. Electron Optics of a Scanning Electron Microscope. In: Scanning Electron Microscopy10.1007/978-3-540-38967-5_2 ↗
4. Orloff · 2009