Progress in Aberration-Corrected STEM

Abstract Electron probe formation in a scanning transmission electron microscope (STEM) has two properties that maximize the benefits of spherical aberration correction: the smallest and brightest probes are formed when all the geometric aberrations are set to zero, and the size of the probe is not greatly affected by the presence of chromatic aberration. This contrasts with the case of conventional, fixed-beam TEM (CTEM), in which optimized phase-contrast imaging demands a non-zero spherical aberration coefficient (Cs), and chromatic aberration constitutes a major resolution limit. As a result, a consensus is presently emerging that the benefits of aberration correction will be felt most strongly in STEM. Our efforts in Cs-corrected STEM have progressed from a proof-of-principle Cs corrector [1] to an optimized second-generation design [2]. The corrector in both cases is of the quadrupole-octupole type. The second-generation corrector uses separate quadrupoles and octupoles, and concentrates on maximizing the octupole strength.