20th Anniversary of Evactron® Plasma Cleaners for SEMs and FIBs
Source abstract
Abstract
The newest Evactron 50 model produces a higher power and clean 50 Watt plasma by means of moving the hollow cathode outside of the plasma.
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Electron and X-Ray Spectroscopy Techniques · Advanced Electron Microscopy Techniques and Applications · Ion-surface interactions and analysis
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (4)
Show source-provided references
1. R Vane , US Patents 6,105,589 (issued Aug. 2000) and 6,452,315 (issued Sept. 2002).
2. Morgan · Microsc. Microanal · 2007 · 13 · 1736
3. 10.1117/12.43672410.1117/12.436724 ↗
4. 10.1017/S143192761700105210.1017/S1431927617001052 ↗