Precession Electron Diffraction (PED) Strain Measurements in Stacked Nanosheet Structures
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Research context
OpenAlex topics: Metal and Thin Film Mechanics · Advanced Surface Polishing Techniques · Copper Interconnects and Reliability
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References (3)
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1. This work was performed by the Research Alliance teams at various IBM Research and Development Facilities.
2. 10.1063/1.501099710.1063/1.5010997 ↗
3. Ghani · IEDM · 2003 · 1161