“Stand-Out”: A Novel Approach for Preparing Sub-100 nm Samples Through in situ Ion Induced Bending
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Abstract
Vivek Garg, Shuo Zhang, Rakesh G Mote, Yu Chen, Lingfei Cao, Jing Fu; “Stand-Out”: A Novel Approach for Preparing Sub-100 nm Samples Through in situ Ion In
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Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Advanced Materials Characterization Techniques · Integrated Circuits and Semiconductor Failure Analysis · Advanced Surface Polishing Techniques
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References (5)
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1. 10.1016/j.ultramic.2007.02.02410.1016/j.ultramic.2007.02.024 ↗
2. Garg · Weaving Nanostructures with Site-Specific Ion Induced Bidirectional Bending
3. 10.1016/S0968-4328(99)00005-010.1016/S0968-4328(99)00005-0 ↗
4. The work is financially supported by IITB-Monash Research Academy, the Australian Research Council (DP180103955), IRCC (Seed grant: Spons/ME/I14079-1/2014), IIT Bombay, and Tata Consultancy Services (TCS) research scholarship program. The authors acknowledge the use of facilities within the Monash Centre for Electron Microscopy (MCEM), and Melbourne Centre for Nanofabrication (MCN), Victorian Node of the Australian National Fabrication Facility (ANFF).
5. 10.1016/j.ultramic.2015.02.00310.1016/j.ultramic.2015.02.003 ↗