journal article·2003-08Open access

The Versatile FEG-SEM: From Ultra-High Resolution To Ultra-High Surface Sensitivity

Jingyue Liu

Microscopy and Microanalysis· Volume 9· Issue S02

Abstract

distribution on and near the sample surface. The contrast mechanisms, the image resolution, and the applications of various high-resolution SEM imaging techniques will be discussed.
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short

Research context

OpenAlex topics: Electron and X-Ray Spectroscopy Techniques · Surface Roughness and Optical Measurements · Optical Coatings and Gratings

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References

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