Measurement of Elemental Composition of FeNi and SiGe Thin Films by Electron Probe Microanalysis with Stratagem Software
Source abstract
Abstract
Vasile-Dan Hodoroaba, Kyung Joong Kim; Measurement of Elemental Composition of FeNi and SiGe Thin Films by Electron Probe Microanalysis with Stratagem Soft
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Electron and X-Ray Spectroscopy Techniques · Advanced Materials Characterization Techniques · Semiconductor materials and interfaces
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (5)
Show source-provided references
1. 10.1002/sia.497410.1002/sia.4974 ↗
2. 10.1002/sia.497510.1002/sia.4975 ↗
3. 10.1016/j.apsusc.2017.08.13610.1016/j.apsusc.2017.08.136 ↗
4. 10.1021/acs.analchem.6b0084710.1021/acs.analchem.6b00847 ↗
5. 10.1007/s00216-002-1514-510.1007/s00216-002-1514-5 ↗