journal article·2018-08Open access

Measurement of Elemental Composition of FeNi and SiGe Thin Films by Electron Probe Microanalysis with Stratagem Software

Vasile-Dan Hodoroaba, Kyung Joong Kim

Microscopy and Microanalysis· Volume 24· Issue S1

Abstract

Vasile-Dan Hodoroaba, Kyung Joong Kim; Measurement of Elemental Composition of FeNi and SiGe Thin Films by Electron Probe Microanalysis with Stratagem Soft
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short

Research context

OpenAlex topics: Electron and X-Ray Spectroscopy Techniques · Advanced Materials Characterization Techniques · Semiconductor materials and interfaces

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References (5)

Show source-provided references
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4. 10.1021/acs.analchem.6b0084710.1021/acs.analchem.6b00847 ↗
5. 10.1007/s00216-002-1514-510.1007/s00216-002-1514-5 ↗