journal article·2018-08Open access

Utilizing Low-Dose Transmission Electron Microscopy for Structure and Defect Identification in Group III - Nitride Electronic Devices

Petra Specht, Martina Luysberg, J. Chavez, T.R. Weatherford, T.J. Anderson, A.D. Koehler, C. Kisielowski

Microscopy and Microanalysis· Volume 24· Issue S1

Abstract

Petra Specht, Martina Luysberg, J Chavez, TR Weatherford, TJ Anderson, AD Koehler, C Kisielowski; Utilizing Low-Dose Transmission Electron Microscopy for S
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short

Research context

OpenAlex topics: Electron and X-Ray Spectroscopy Techniques · Semiconductor materials and devices · Integrated Circuits and Semiconductor Failure Analysis

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References (1)

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1. 10.1016/j.micron.2014.07.01010.1016/j.micron.2014.07.010 ↗