Real Time Acquisition and Calibration of S/TEM Probe Current Measurement Simultaneously with Any Imaging or Spectroscopic Signal

Stephen D. House; C. Tom Schamp; Judith C. Yang

doi:10.1017/s1431927618001125

journal article·2018-08Open access

Real Time Acquisition and Calibration of S/TEM Probe Current Measurement Simultaneously with Any Imaging or Spectroscopic Signal

Stephen D. House, C. Tom Schamp, Judith C. Yang

Microscopy and Microanalysis· Volume 24· Issue S1

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Abstract

Stephen D House, C Tom Schamp, Judith C Yang; Real Time Acquisition and Calibration of S/TEM Probe Current Measurement Simultaneously with Any Imaging or S

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Source: openalex_inverted_index · Quality: short

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OpenAlex topics: Integrated Circuits and Semiconductor Failure Analysis · Advanced Electron Microscopy Techniques and Applications · Electron and X-Ray Spectroscopy Techniques

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References (7)

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