Development of Compact Cs/Cc Corrector with Annular and Circular Electrodes
Source abstract
Abstract
Tadahiro Kawasaki, Ryuji Yoshida, Takeharu Kato, Tsunenori Nomaguchi, Toshihide Agemura, Tetsuji Kodama, Masahiro Tomita, Takashi Ikuta; Development of Com
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Semiconductor materials and devices · Electronic and Structural Properties of Oxides · Advanced Electron Microscopy Techniques and Applications
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (4)
Show source-provided references
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2. Kawasaki T. , et al PCT/JP2016/053691.
3. 10.1002/sia.613110.1002/sia.6131 ↗
4. Krivanek · Inst. Phys. Conf · 1997 · 153 · 35