Avoiding Bias of Focused Ion Beam Edge Resolution Measurements at High Doses
Source abstract
Abstract
Zinovi Malamud, Yuval Greenzweig, Amir Raveh; Avoiding Bias of Focused Ion Beam Edge Resolution Measurements at High Doses, Microscopy and Microanalysis, V
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Electron and X-Ray Spectroscopy Techniques · Ion-surface interactions and analysis · Integrated Circuits and Semiconductor Failure Analysis
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (12)
Show source-provided references
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