Three-dimensional Confocal Imaging Using Coherent Elastically Scattered Electrons
Source abstract
Abstract
Changlin Zheng, Lazar Sorin, Ye Zhu, Joanne Etheridge; Three-dimensional Confocal Imaging Using Coherent Elastically Scattered Electrons, Microscopy and Mi
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Integrated Circuits and Semiconductor Failure Analysis · Advanced Electron Microscopy Techniques and Applications · Force Microscopy Techniques and Applications
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References (6)
Show source-provided references
1. Wilson · 1984
2. 10.1063/1.150601010.1063/1.1506010 ↗
3. 10.1103/PhysRevLett.112.16610110.1103/PhysRevLett.112.166101 ↗
4. 10.1103/PhysRevLett.104.20080110.1103/PhysRevLett.104.200801 ↗
5. Xin · Microsc. Microanal. · 2013 · 19
6. The authors acknowledge the use of facilities and staff support at the Monash Centre for Electron Microscopy.