Low Voltage Soft X-ray Emission Analysis from 100 V for Depth Chemical Information from a few nm to several hundred nm
Source abstract
Abstract
H Takahashi, S Asahina, Y Yamamoto, Y Sakuda, T Kanazawa, M Terauchi, V Robertson, P McSwiggen, C Dickinson; Low Voltage Soft X-ray Emission Analysis from
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Electron and X-Ray Spectroscopy Techniques · X-ray Spectroscopy and Fluorescence Analysis · Integrated Circuits and Semiconductor Failure Analysis
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (3)
Show source-provided references
1. JEOL News · 2013 · 48 · 21
2. 10.1093/jmicro/dfr07610.1093/jmicro/dfr076 ↗
3. Microscopy and Microanalysis · 2014 · 20