Study of Direct Lithiation of Thin Si Membranes with Spatially-Correlative Low Energy Focused Li Ion Beam and Analytical Electron Microscopy Techniques

V.P. Oleshko; K.A. Twedt; C.L. Soles; J.J. McClelland

doi:10.1017/s143192761600862x

journal article·2016-07Open access

Study of Direct Lithiation of Thin Si Membranes with Spatially-Correlative Low Energy Focused Li Ion Beam and Analytical Electron Microscopy Techniques

V.P. Oleshko, K.A. Twedt, C.L. Soles, J.J. McClelland

Microscopy and Microanalysis· Volume 22· Issue S3

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Abstract

VP Oleshko, KA Twedt, CL Soles, JJ McClelland; Study of Direct Lithiation of Thin Si Membranes with Spatially-Correlative Low Energy Focused Li Ion Beam an

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OpenAlex topics: Advanced Electron Microscopy Techniques and Applications · Electron and X-Ray Spectroscopy Techniques · Integrated Circuits and Semiconductor Failure Analysis

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References (5)

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