High Performance in Low Voltage HR-STEM Applications Enabled By Fast Automatic Tuning of the Combination of a Monochromator and Probe Cs-Corrector

Sorin Lazar; Peter Tiemeijer; Sander Henstra; Terry Dennemans; Jan Ringnalda; Bert Freitag

doi:10.1017/s1431927616005742

journal article·2016-07Open access

High Performance in Low Voltage HR-STEM Applications Enabled By Fast Automatic Tuning of the Combination of a Monochromator and Probe Cs-Corrector

Sorin Lazar, Peter Tiemeijer, Sander Henstra, Terry Dennemans, Jan Ringnalda, Bert Freitag

Microscopy and Microanalysis· Volume 22· Issue S3

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Sorin Lazar, Peter Tiemeijer, Sander Henstra, Terry Dennemans, Jan Ringnalda, Bert Freitag; High Performance in Low Voltage HR-STEM Applications Enabled By

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OpenAlex topics: Advanced Electron Microscopy Techniques and Applications · Electron and X-Ray Spectroscopy Techniques · Integrated Circuits and Semiconductor Failure Analysis

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References (5)

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1. 10.17815/jlsrf-1-5710.17815/jlsrf-1-57 ↗

2. 10.1016/S0304-3991(99)00013-310.1016/S0304-3991(99)00013-3 ↗

3. 10.1016/j.ultramic.2012.01.00810.1016/j.ultramic.2012.01.008 ↗

4. Microscopy and Microanalysis · 2006 · 12 · 442

5. 10.1038/3382310.1038/33823 ↗