Origins and Contrast of the Electron Signals at Low Accelerating Voltage and with Energy-Filtering in the FE-SEM for High Resolution Imaging

Hendrix Demers; Nicolas Brodusch; Patrick Woo; Raynald Gauvin

doi:10.1017/s1431927615004328

journal article·2015-08Open access

Origins and Contrast of the Electron Signals at Low Accelerating Voltage and with Energy-Filtering in the FE-SEM for High Resolution Imaging

Hendrix Demers, Nicolas Brodusch, Patrick Woo, Raynald Gauvin

Microscopy and Microanalysis· Volume 21· Issue S3

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Abstract

Hendrix Demers, Nicolas Brodusch, Patrick Woo, Raynald Gauvin; Origins and Contrast of the Electron Signals at Low Accelerating Voltage and with Energy-Fil

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OpenAlex topics: Electron and X-Ray Spectroscopy Techniques · Advancements in Photolithography Techniques · Advanced Electron Microscopy Techniques and Applications

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References (4)

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3. 10.1116/1.278787410.1116/1.2787874 ↗

4. 2003