Focused Ne+ Ion Beams for Final Polishing of TEM Lamella Prepared Through Ga-FIB Systems
Source abstract
Abstract
Doug Wei, Chuong Huynh, Alexander Ribbe; Focused Ne+ Ion Beams for Final Polishing of TEM Lamella Prepared Through Ga-FIB Systems, Microscopy and Microanal
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Advanced Materials Characterization Techniques · Integrated Circuits and Semiconductor Failure Analysis · Advanced Electron Microscopy Techniques and Applications
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (3)
Show source-provided references
1. 10.3762/bjnano.3.6710.3762/bjnano.3.67 ↗
2. 10.1002/sia.106310.1002/sia.1063 ↗
3. 10.1557/mrs2007.6310.1557/mrs2007.63 ↗