DataVXMicroscopy and MicroanalysisPaper
journal article·2014-10

Interfacial Energy-Dispersive Spectroscopy Profile X-Ray Resolution Measurements in Variable Pressure SEM

Abdelhalim Zoukel, Lahcen Khouchaf, Jean Di Martino, David Ruch

Microscopy and Microanalysis· Volume 20· Issue 5
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Source abstract

Abstract

Abstract A procedure has been developed to follow degradation of energy-dispersive spectroscopy (EDS) X-ray lateral resolution in a variable pressure scanning electron microscope. This procedure is based on evaluation of the EDS profile shape change for different experimental conditions. Some parameters affecting the X-ray resolution in high-vacuum mode have been taken into account. Good agreement between the simulated and experimental EDS profiles shows the reliability of the proposed procedure. A significant improvement in measurement of the EDS profile interfacial distance (DINT) has been achieved.
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Research context

OpenAlex topics: Electron and X-Ray Spectroscopy Techniques · Advancements in Photolithography Techniques · Semiconductor materials and devices

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