journal article·2002-08Open access

Sub-Angstrom Probe Size in HADF-STEM at 120KV

P.E. Batson, N. Dellby, O.L. Krivanek

Microscopy and Microanalysis· Volume 8· Issue S02

Abstract

PE Batson, N Dellby, OL Krivanek; Sub-Angstrom Probe Size in HADF-STEM at 120KV, Microscopy and Microanalysis, Volume 8, Issue S02, 1 August 2002, Pages 14
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Source: openalex_inverted_index · Quality: short

Research context

OpenAlex topics: Electron and X-Ray Spectroscopy Techniques · Advanced Electron Microscopy Techniques and Applications · Integrated Circuits and Semiconductor Failure Analysis

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