X-ray spectral imaging in the STEM for microelectronics failure analysis
Source abstract
Abstract
PG Kotula, MR Keenan; X-ray spectral imaging in the STEM for microelectronics failure analysis, Microscopy and Microanalysis, Volume 9, Issue S02, 1 August
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Electron and X-Ray Spectroscopy Techniques · Integrated Circuits and Semiconductor Failure Analysis · X-ray Spectroscopy and Fluorescence Analysis
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References
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