Methodology for Studying Nanoscale Details of Focused Ion Beam Gas-Assisted Etching and Deposition by TEM and Numerical Modeling
Source abstract
Abstract
Valery Ray, Eddie Chang, Kevin Toula, Sz-Chian Liou, Wen-An Chiou; Methodology for Studying Nanoscale Details of Focused Ion Beam Gas-Assisted Etching and
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Metal and Thin Film Mechanics · Ion-surface interactions and analysis · Electron and X-Ray Spectroscopy Techniques
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References (2)
Show source-provided references
1. JVST B · 2008 · 26 · 1197
2. JVST B · 2012 · 30 · 06F606